中微半導體設備有限公司（簡稱“中微”）宣布獲得韓國先進存儲芯片生產廠商購買Primo SSC AD-RIE™（中微單反應台等離子體刻蝕設備）的重複訂單。該設備被客戶認可為用於16納米關鍵閃存芯片加工的首選設備（PTOR），將用於大批量芯片生產。此前，中微的Primo SSC AD-RIE™通過客戶生產線上嚴格的驗證，取得了比其他同類競爭產品更加優異的結果。中微現在正在和客戶合作研究開發DRAM和3D NAND工藝。 

 

 

圖1：中微單反應台等離子體刻蝕設備Primo SSC AD-RIE(TM) 

 

中微副總裁兼韓國區總經理尹敬一表示
，中微設備成為“PTOR”標誌著中微取得了一項重大進展，他說道：“henmingxian，xianzaichuyushijieqianyandekehubudandanxiangconggongyingshangnaerxunzhaoxinshebei，tamenhaixiwangnenggouweifuzadeshengchanguochengdailaidetiaozhanxunqiuquanmianjiejuefangan。zhejiuyaoqiuxianjinjishuhexiangguanzhuanyezhishijinmilianxizaiyiqi
，zhengshiyikaozhezhongmoshi，womenweigaikehujiejueleshengchanguochengzhongpengdaodegezhongwenti，shidekehudeshancunxinpiankaifaqudexindejinzhan。” 

 

Primo SSC AD-RIE™是中微Primo係列第三代、也是最新一代刻蝕設備產品，能夠滿足超高產能
、優異的芯片加工質量和芯片刻蝕技術可延展性等嚴苛的技術要求。Primo SSC AD-RIE™的晶圓傳遞平台可配置多達6gedanjingyuanjiagongfanyingqi，meigefanyingqikeyidulidishedingjiagongtiaojian，congerlinghuodishixianjingzhundegongyikongzhi。meigefanyingqiyoujigaodechousu，bingyouduoquqitifenbu、動態射頻gonglvyijiduoquwendukongzhidengkedulitiaojiedegongyicanshu。erzaixiangongyiweitiaohewengudeqiangtishejibimianlegaoshenkuanbikeshigongyizhongchangchuxiandekeshitingzhixianxiangyijigongyipiaoyixianxiangdefasheng，congertigaokeshidezhongfuxingbinggengrongyishixianfanyingqizhijiandelianghaopipei，nenggoudadatigaoshengchanxiaolv。 

 

中(zhong)微(wei)刻(ke)蝕(shi)設(she)備(bei)的(de)一(yi)大(da)關(guan)鍵(jian)優(you)勢(shi)在(zai)於(yu)它(ta)的(de)配(pei)置(zhi)極(ji)具(ju)靈(ling)活(huo)性(xing)。它(ta)在(zai)同(tong)一(yi)個(ge)主(zhu)機(ji)係(xi)統(tong)上(shang)可(ke)以(yi)配(pei)備(bei)雙(shuang)反(fan)應(ying)器(qi)實(shi)現(xian)高(gao)產(chan)出(chu)和(he)低(di)成(cheng)本(ben)，或(huo)者(zhe)也(ye)可(ke)以(yi)配(pei)備(bei)單(dan)反(fan)應(ying)器(qi)以(yi)滿(man)足(zu)關(guan)鍵(jian)刻(ke)蝕(shi)工(gong)藝(yi)中(zhong)高(gao)抽(chou)速(su)等(deng)要(yao)求(qiu)。這(zhe)種(zhong)配(pei)置(zhi)的(de)靈(ling)活(huo)性(xing)還(hai)體(ti)現(xian)在(zai)氣(qi)體(ti)控(kong)製(zhi)係(xi)統(tong)的(de)安(an)裝(zhuang)上(shang)

，他(ta)們(men)既(ji)可(ke)以(yi)置(zhi)於(yu)地(di)麵(mian)以(yi)便(bian)於(yu)維(wei)護(hu)
，也(ye)可(ke)以(yi)置(zhi)於(yu)設(she)備(bei)上(shang)方(fang)以(yi)減(jian)少(shao)占(zhan)地(di)麵(mian)積(ji)。 

 

Primo SSC AD-RIE和Primo D-RIE是中微的注冊商標。